At the end, we will say a few words about dealing with the second category. At last, new choices have been developed. On the fly compression.
The patterning of these circles differs slightly between my SEM images and the chipworks optical image above. In fact on the SEM image they look a lot more like holes.
The perforated member contains a number of openings 21 through which a sacrificial layer not shown between the diaphragm and perforated member is etched during fabrication to form the air gap Makes sense to me!
No such luck really. Below are a couple more images for your viewing pleasure. The bits sticking out below, I assume are anchor points. So it seems it does extend all the way to this point. The overall construction seems straightforward well, as awe inspiring as MEMS always is.
But there are a few questions I still have… like why are there 2 diaphragms? Is that a yield issue or a signal issue? What are the larger circles at the edge of the diaphragm? So… this MEMS journal post has a bunch of useful information. This is great, but the second cross-sectional view helped even more see below.
The microphone is a capacitor whose capacitance varies, initially I was thinking that the diaphragm and the bottom of the cavity formed the capacitor.
The central connection to the bottom. One final question I have then is how is the main cavity formed? And why is it needed? This seems to be one of the few MEMS humidity sensors on the market, and seems to perform very well. So in the SEM it goes! The tiny can seems to contain 3 discrete dies.
In the image to the right you can see the large lower die, and a much smaller upper die. So… my gut feeling is that the lower die is a pressure sensor.
Most MEMS pressure sensors appear to be based on a diaphragm with a piezo coating. So I focused on the upper die, shown to the left, and found the construction to be surprisingly interesting. It looks like there are 2 large pads with some kind of I assume thin-film placed over them.
This film was really interesting. Moving up to x we can start to see structure in this film:touch Market to launch the Android Market. Wait a moment while you are signed into your account. For this example we will enter an existing account. Touch Sign in. Review information provided on this screen.
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